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  1. MultiCPM - Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor

    The MULTISEM design concept is based on an open parallel architecture consisting of a central supervisor control unit, and a network of analytical substations
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    Jobin Yvon1
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    dry etching1
    optical emission1
    optical emission spectroscopy1
    dry etch1
    thin film characterisation1
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    thin film monitors1
    Digitwin0
    plasma characterisation0

    www.multisem.com - 2009-02-13

nano2 process control2 interferometry1 phase modulated ellipsometer1 measurement2 icp1 automation3 etch1 optical properties1 electrical3 micro2 interferometer1 glass3 engineering4 mems1 dry etching1 plasma2 nanotechnology2 etching2 metrology2 engrave1

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